在集成电路制造过程中，通过WAT测试(晶圆允收测试)提取工艺和器件性能的信息用于指导芯片产品的过程研发和生产控制。随着制造工艺越来越复杂，WAT测试也变得越来越重要。
广立微WAT测试机是一款功能强大的快速电学参数测试机，为客户提供准确且高度自动化的测试解决方案用于快速和更好地监控工艺。测试机让工程师在半导体晶圆制造工艺的测量中显著地节省时间，特别在与广立微的可寻址测试芯片解决方案结合使用后，其测试效率更高。广立微WAT测试机已经应用于多家领先的晶圆厂的量产产线和研发实验室。
| WAT Tester | T4000 (24/48 pin)* | T4100S (25/48 pin)* |
| Standard Resources | HR_SMU+HS_SMU (4~18) | Group SMU (25/48) |
| Pulse generator (2) | Pulse generator (2) | |
| Signal analyzer (2) | Signal analyzer (2) | |
| Switch matrix | HSPU (hybrid signal processing unit) | |
| LCR Meter (1) | LCR Meter (1) | |
| Number of measurement pins | 24/48 | 25/48 |
| Voltage Coverage | ±200 V | ±200 V |
| Current Coverage | ±1 A | ±1 A |
| Voltage measure sensitivity | 100 nV | 100 nV |
| Current measure sensitivity | 10 fA or 0.1fA# | 10 fA or 0.1fA# |
| Voltage measure accuracy | 100uV | 100uV |
| Current measurement accuracy | sub-pA | sub-pA |
| Maximum SMU sample rate | 1.8M samples/sec | 1.8M samples/sec |
| Capacitance measurement accuracy | 10 fF | 10 fF |
| RO Frequency Coverage | ~ 20MHZ | ~ 20MHZ |
| Measurement Functions | DC Current / DC Voltage / Kelvin / Capacitance / Inductance AC Current / AC Voltage / Differential Voltage / Frequency Arbitrary Waveform / Clock Generation / Synchronization (triggering mode)# / C-V scan |
|
| Typical Supported Test Items | ID/VT/VTGM/IOFF/ISUB/BV/CAP/ICP | |
| BETA/VBE/BVCEO/BVCBO/BVEBO | ||
| R2/RKLV/LK/CAP_METAL | ||
| IREAD/ISTANDBY/IDDQ/WM/SNM | ||
| ERASE/PROGRAM | ||
| IDDA/IDDQ/FREQ | ||
| IV/CV | ||
| Mean time between failures (MTBF) | > 1000 hours | > 1000 hours |
| Mean time to repair (MTTR) | < 6 hours | < 6 hours |
| Uptime rate | ~ 97% | ~ 97% |
# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.
关注我们