WLR（Wafer Level Reliability Testing，晶圆级可靠性测试）是一种专门用于评估半导体器件在晶圆阶段可靠性的测试方法。这种测试方法在晶圆级直接对芯片进行可靠性测试，以确保器件满足高质量和长寿命的要求。WLR测试包括一系列严格的应力测试，如热载流子注入测试（HCI）、偏置温度不稳定寿命测试（BTI）电迁移（EM）、依时介电击穿寿命测试（VTDDB）、升压介电击穿电压测试（VRAMP）等。这些测试模拟了器件在各种极端条件下的工作环境，帮助工程师识别并改进工艺中的薄弱环节，提高产品的整体可靠性。
WLR测试广泛应用于各种半导体器件的制造过程中，尤其在高性能和高可靠性要求的领域，如汽车电子、通信设备、消费电子和工业控制等。通过严格的晶圆级可靠性测试，制造商能够保证其产品在实际应用中的稳定性和耐久性，从而满足客户对高质量电子产品的需求。
| WLR Tester | T4000 (24/48/100 pin) |
| Standard Resources | HR_SMU+HS_SMU (4~36) |
| Pulse generator (2/4)# | |
| Signal analyzer (2)# | |
| Switch matrix | |
| LCR Meter (1/2)# | |
| Number of measurement pins | 24/48/100 |
| Voltage Coverage | ±200 V |
| Current Coverage | ±1 A |
| Voltage measure sensitivity | 100 nV |
| Current measure sensitivity | 10 fA or 0.1fA# |
| Voltage measure accuracy | 100uV |
| Current measurement accuracy | sub-pA |
| Maximum SMU sample rate | 1.8M samples/sec |
| Capacitance measurement accuracy | 10 fF# |
| RO Frequency Coverage | ~ 20MHZ# |
| Measurement Functions | DC Current / DC Voltage / Kelvin / Capacitance / Inductance AC Current / AC Voltage / Differential Voltage / Frequency Arbitrary Waveform / Clock Generation #/ Synchronization (triggering mode)# / C-V scan# |
| Typical Supported Test Items | VRAMP/JRAMP |
| VTDDB/JTDDB | |
| HCI | |
| BTI/BTI_OTF | |
| FASTRES/KELRES/ISO_EMR/TCR/TVP/CONSTANT_I | |
| Mean time between failures (MTBF) | > 1000 hours |
| Mean time to repair (MTTR) | < 6 hours |
| Uptime rate | ~ 97% |
# Can select based on user needs
This table shows recommend testers at different application, if you have other requirements, please contact us.
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